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In-Line Metal Film Thickness Metrology


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XwinSys offers a unique method of measuring metal film stack thickness with a combination of sensors including X-ray Fluorescence, 3D Confocal and 2D Imaging.  No vacuum chamber.


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Total Height measurement using the 3D Confocal and SnAg / Ni thickness measurement using the ED-XRF results in an accurate measurement of all the metal layers thickness.


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One measurement recipe has the ability to set thresholds on several parameters.  It can also accommodate 'if then' scenarios based on measurements being out of spec and an in-situ review to enable more analysis.  The tool also has the capability to read a Results File from an inspection tool and review with in-depth film thickness and compositional analysis.