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Refurbishments


KLA-Tencor Inspection Systems

Non-Patterned Inspection Units:
  • Surfscan 4000, 5000, 6000, SP1 and SP1 TBI Series
Patterned Inspection Units:
  • Surfscan 7000 and AIT Series
KLA Defect Inspection Systems
  • KLA 21XX Series
  • KLA UV Series
KLA-Tencor Surface Profiler
  • Tencor Alpha Step Series
  • Tencor P Series
KLA-Tencor Prometrix, Resistivity Mapping
and Film Thickness Mapping Systems
  • Resistivity Mapping System
  • Prometrix RS Series
  • Film Thickness Mapping System
  • Prometrix FT Series
  • Prometrix SM Series